The Openstreetmap community in Ireland have embarked on a project to digitise all Townland / Civil Parish and Barony boundaries. Use of this data is copyright free to anybody as long as the source is acknowledged as "Copyright Openstreetmap AND Its Contributors"... and thats it pretty much.
Four counties are now complete
Fermanagh Wexford Carlow and Longford.
Some others are well underway but progress is patchy in parts of Ulster and Munster. The task monitoring website for the OSM Boundary Digitisation Project is also live at
http://www.townlands.ieTo see how a county is coming along click
http://www.townlands.ie/progress and then click on an individual county on that list to see Townlands Baronies and Civil Parishes and with Electoral Divisions due online presently.
HTH